For high vacuum thin film coating
DC, RF and DC pulse operations
500W max DC power
Target thickness 7mm max.
Stable plasma down to 1 mTorr Ar
Local gas injection standard in all models
Monoblock anode chimney design
Can be mounted on required flanges
2", 3" and 4" models available
These Halbach Arrays are used to create permanent homogenous high magnetic fields. Supplied upon special orders. Please contact us for your requirements.
2mm ID x 4mm OD LaB6 tube emitter
1-10A stable electron current
1-5 sccm Argon
Alumina coated Keeper