• For high vacuum thin film coating 

  • DC, RF and DC pulse operations

  • 500W max DC power

  • Target thickness 7mm max.

  • Stable plasma down to 1 mTorr Ar

  • Local gas injection standard in all models

  • Monoblock anode chimney design

  • Can be mounted on required flanges

  • 2", 3" and 4" models available

  • Homogenous coating without rotation for parts up to 30mm diameter  
  • Fast  coating thanks to HCM design
  • Stable plasma down to 0.5 mTorr Ar 
  • High density 3D thin film coating
  • DC, RF ve DC pulse modes for various materials 
  • 2kW maximum DC power
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These Halbach Arrays are used to create permanent homogenous high magnetic fields.       Supplied upon special orders. Please contact us for your requirements.

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COAXIAL HOLLOW CATHODE

for SPACE THRUSTERS

  • 2mm ID x 4mm OD LaB6 tube emitter

  • 1-10A stable electron current

  • 1-5 sccm Argon / Xenon

  • Alumina coated Keeper 

  • 20-30A versions available

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MAGNETRON SPUTTER CATHODE
CYLINDRICAL HALBACH MAGNETS
HOLLOW CATHODE MAGNETRON 3D COATING SYSTEM